产品名称
甲基三氯硅烷, deposition grade, ≥98% (GC), ≥99.99% (as metals)
InChI
1S/CH3Cl3Si/c1-5(2,3)4/h1H3
InChI key
JLUFWMXJHAVVNN-UHFFFAOYSA-N
SMILES string
C[Si](Cl)(Cl)Cl
grade
deposition grade
vapor density
5.2 (vs air)
vapor pressure
150 mmHg ( 25 °C)
assay
≥98% (GC)
≥99.99% (as metals)
form
liquid
autoignition temp.
>760 °F
expl. lim.
11.9 %
refractive index
n20/D 1.411 (lit.)
bp
66 °C (lit.)
density
1.273 g/mL at 25 °C (lit.)
Quality Level
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signalword
Danger
Hazard Classifications
Acute Tox. 3 Inhalation - Acute Tox. 4 Dermal - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1A - STOT SE 3
target_organs
Respiratory system
存储类别
3 - Flammable liquids
wgk
WGK 1
flash_point_f
46.4 °F - closed cup
flash_point_c
8 °C - closed cup
法规信息
商品
atomic layer deposition (ALD), microelectronics, Mo:Al2O3 films, nanocomposite coating, photovoltaics, semiconductor devices, W:Al2O3 films, composite films, layer-by-layer
Silica's versatility spans various industries, including biomedical applications.
Deposition Grade Silanes, fully characterized by chemical analysis and nuclear magnetic resonance (NMR) with greater than 98% purity, for Sol-Gel Processes.
Reactive silicone chemistry: Focus on pure silicon production, polymerizations, and controlled stereochemistry reactions.
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