所有图片(2)
别名:
N,N,N-trimethyl-methanaminium hydroxide, TMAH, TMAOH
线性分子式:
(CH3)4N(OH)
CAS号:
分子量:
91.15
Beilstein:
3558708
MDL编号:
UNSPSC代码:
12352100
PubChem化学物质编号:
NACRES:
NA.21
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蒸汽压
17.5 mmHg ( 20 °C)
质量水平
浓度
10 wt. % in H2O
折射率
n20/D 1.3521
密度
1.006 g/mL at 25 °C
SMILES字符串
[OH-].C[N+](C)(C)C
InChI
1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1
InChI key
WGTYBPLFGIVFAS-UHFFFAOYSA-M
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一般描述
四甲基氢氧化铵（TMAH）是一种市售的季铵碱，其碱度明显高于氢氧化铵。
应用
四甲基氢氧化铵溶液（在 H2O 中为 10 wt.%）可用作：
TMAH 由于其高硅蚀刻速率，也可用作硅的各向异性蚀刻剂。使用 TMAH 的主要优点是，由于不存在碱离子，它不会对电路造成危险。
- 一种在 IPA 中使用 2-（3，4-环氧环己基）乙基三甲氧基硅烷（ECTMS）通过溶胶-凝胶法合成环氧多面体低聚倍半硅氧烷（EPOSS）的反应物。
- 一种用于修饰 SnO2 纳米晶体的离子液体，可作为钙钛矿太阳能电池中的有效电子传输层。
TMAH 由于其高硅蚀刻速率，也可用作硅的各向异性蚀刻剂。使用 TMAH 的主要优点是，由于不存在碱离子，它不会对电路造成危险。
警示用语：
Danger
危险分类
Acute Tox. 1 Dermal - Acute Tox. 3 Oral - Aquatic Chronic 3 - Eye Dam. 1 - Skin Corr. 1B - STOT RE 1 Dermal - STOT SE 1
靶器官
Central nervous system, Liver,thymus
WGK
WGK 3
闪点(°F)
Not applicable
闪点(°C)
Not applicable
个人防护装备
Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
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Polymers, 13(10) (2021-06-03)
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