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安全信息

759562

Sigma-Aldrich

三（二甲氨基）硅烷

packaged for use in deposition systems

别名:

三（二甲氨基）硅烷, (Me2N)3SiH, N,N,N′,N′,N′′, N′′-六甲基硅烷三胺, 三（二甲基氨基）硅烷, N,N,N′,N′,N′′′,N′′′-六甲基硅烷三胺, TDMA

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About This Item

线性分子式:
((CH3)2N)3SiH
CAS号:
15112-89-7
分子量:
161.32
EC 号:
239-165-0
MDL编号:
MFCD00048006
UNSPSC代码:
12352103
PubChem化学物质编号:
329766793
NACRES:
NA.23

质量水平

100

检测方案

≥99.9% (GC)

形式

liquid

bp

142 °C (lit.)

mp

−90 °C (lit.)

密度

0.838 g/mL at 25 °C (lit.)

SMILES字符串

CN(C)[SiH](N(C)C)N(C)C

InChI

1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

InChI key

TWVSWDVJBJKDAA-UHFFFAOYSA-N

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相关类别

一般描述

Tris(dimethylamino)silane is an organosilicon compound with high volatility and thermal stability, widely used as a vapor deposition precursor to fabricate silicon-containing thin films for various applications, including solar cells, fuel cell catalysts, and semiconductors. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range, thus making it a very good vapor deposition precursor.

应用

Tris(dimethylamino)silane can be used:
  • As a silicon source for deposition of aluminum silicate on TiO2 anodes for dye-sensitized solar cells vis atomic layer deposition method.
  • As a precursor to fabricate functionalized Si reinforced separators for Li-ion batteries.

警示用语：

Danger

危险分类

Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react 2

补充剂危害

EUH029

WGK

WGK 3

闪点(°F)

closed cup

闪点(°C)

closed cup

法规信息

非剧毒-急性毒性1

分析证书(COA)

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  1. Which document(s) contains shelf-life or expiration date information for a given product?

    If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.

  2. How do I get lot-specific information or a Certificate of Analysis?

    The lot specific COA document can be found by entering the lot number above under the "Documents" section.

  3. How do I find price and availability?

    There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote.  USA customers:  1-800-325-3010 or view local office numbers.

  4. What is the Department of Transportation shipping information for this product?

    Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product. 

  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

  6. My question is not addressed here, how can I contact Technical Service for assistance?

    Ask a Scientist here.

Boudreau; M.; Boumerzoug; M.; Mascher; P.; Jessop; P. E.
Applied Physics Letters, 63, 3014-3014 (1993)
Hirose; F.; Kinoshita; Y.; Shibuya; S.; et al
Thin Solid Films, 519, 270-270 (2011)
B Ballantyne et al.
Toxicology and industrial health, 5(1), 45-54 (1989-01-01)
The acute handling hazards of tris(dimethylamino)silane [TDMAS] were investigated. The acute male rat peroral LD50 (with 95% confidence limits) was 0.71 (0.51-0.97) ml/kg, and the acute male rabbit percutaneous LD50 was 0.57 (0.35-0.92) ml/kg. The liquid was severely irritating to

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