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759562

Sigma-Aldrich

三（二甲氨基）硅烷

packaged for use in deposition systems

别名:

三（二甲氨基）硅烷, (Me2N)3SiH, N,N,N′,N′,N′′, N′′-六甲基硅烷三胺, 三（二甲基氨基）硅烷, N,N,N′,N′,N′′′,N′′′-六甲基硅烷三胺, TDMA

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About This Item

线性分子式:
((CH3)2N)3SiH
CAS号:
15112-89-7
分子量:
161.32
EC 号:
239-165-0
MDL编号:
MFCD00048006
UNSPSC代码:
12352103
PubChem化学物质编号:
329766793
NACRES:
NA.23

质量水平

100

方案

≥99.9% (GC)

表单

liquid

沸点

142 °C (lit.)

mp

−90 °C (lit.)

密度

0.838 g/mL at 25 °C (lit.)

SMILES字符串

CN(C)[SiH](N(C)C)N(C)C

InChI

1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

InChI key

TWVSWDVJBJKDAA-UHFFFAOYSA-N

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一般描述

三(二甲氨基)硅烷是一种具有高挥发性和热稳定性的有机硅化合物，广泛用作气相沉积前驱体，制造用于太阳能电池、燃料电池催化剂和半导体等各种应用的含硅薄膜。沉积可以在低衬底温度下进行（<150）。TDMAS的熔点和蒸气压在合适的工作范围内，是非常好的气相沉积前驱体。

应用

三(二甲氨基)硅烷可用于：
  • 作为原子层沉积法将硅酸铝沉积到染料敏化太阳能电池TiO2阳极上的硅源。
  • 作为制造锂离子电池功能化硅增强隔膜的前驱体。

警示用语：

Danger

危险分类

Acute Tox. 3 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react 2

补充剂危害

EUH029

储存分类代码

4.3 - Hazardous materials which set free flammable gases upon contact with water

WGK

WGK 3

闪点(°F)

16.0 - 32.0 °F - closed cup

闪点(°C)

-8.89 - 0.00 °C - closed cup

法规信息

非剧毒-急性毒性1

历史批次信息供参考:

分析证书(COA)

Lot/Batch Number
SHBR0510
SHBJ8726
SHBG7213V
SHBG2008V
SHBC4237V

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  1. Which document(s) contains shelf-life or expiration date information for a given product?

    If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.

  2. How do I get lot-specific information or a Certificate of Analysis?

    The lot specific COA document can be found by entering the lot number above under the "Documents" section.

  3. How do I find price and availability?

    There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote.  USA customers:  1-800-325-3010 or view local office numbers.

  4. What is the Department of Transportation shipping information for this product?

    Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product. 

  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

  6. My question is not addressed here, how can I contact Technical Service for assistance?

    Ask a Scientist here.

Boudreau; M.; Boumerzoug; M.; Mascher; P.; Jessop; P. E.
Applied Physics Letters, 63, 3014-3014 (1993)
Hirose; F.; Kinoshita; Y.; Shibuya; S.; et al
Thin Solid Films, 519, 270-270 (2011)
B Ballantyne et al.
Toxicology and industrial health, 5(1), 45-54 (1989-01-01)
The acute handling hazards of tris(dimethylamino)silane [TDMAS] were investigated. The acute male rat peroral LD50 (with 95% confidence limits) was 0.71 (0.51-0.97) ml/kg, and the acute male rabbit percutaneous LD50 was 0.57 (0.35-0.92) ml/kg. The liquid was severely irritating to

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