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Merck
CN

751774

Tris(diethylamido)(tert-butylimido)niobium(V)

packaged for use in deposition systems

别名:

(tert)-Butyliminotris(diethylamino)niobium, tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-niobium, t-Butylimido tris(diethylamido)niobium(V)

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线性分子式:
((CH3)6N)3NbN(CH3)3
化学文摘社编号:
分子量:
380.41
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
MDL number:
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产品名称

Tris(diethylamido)(tert-butylimido)niobium(V), packaged for use in deposition systems

Quality Level

InChI

1S/C4H9N.3C4H10N.Nb/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;+3

SMILES string

CCN(CC)[Nb](=NC(C)(C)C)(N(CC)CC)N(CC)CC

InChI key

CBCDPJRPMPTFKA-UHFFFAOYSA-N

form

liquid

reaction suitability

core: niobium

density

1.015 g/mL at 25 °C

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Application

Tris(diethylamido)(tert-butylimido)niobium(V) is used as a niobium precursor
  • In atomic layer deposition to create niobium-doped tin oxide (NTO), a conductive material. These NTO scaffolds provide a large surface area for thin platinum layers, improving electron transfer in dye-sensitized solar cells.
  • In metal-organic chemical vapor deposition (MOCVD) to grow niobium nitride (NbN) thin films. These films, deposited on silicon wafers, offers good conductivity and are suitable for electronic applications such as gate stacks.

General description

Tris(diethylamido)(tert-butylimido)niobium(V) (TBTDEN) is a volatile, thermally stable liquid used as a niobium precursor for thin-film deposition. It offers high vapor pressure and clean decomposition, making it ideal for applications requiring materials with high dielectric constants and robust barrier layers.

pictograms

FlameExclamation mark

signalword

Danger

Hazard Classifications

Eye Irrit. 2 - Flam. Liq. 2 - STOT SE 3 - Water-react 2

target_organs

Respiratory system

存储类别

4.3 - Hazardous materials which set free flammable gases upon contact with water

wgk

WGK 3

flash_point_f

26.6 °F - closed cup

flash_point_c

-3 °C - closed cup

法规信息

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历史批次信息供参考:

分析证书(COA)

Lot/Batch Number

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  1. Which document(s) contains shelf-life or expiration date information for a given product?

    If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.

  2. How do I get lot-specific information or a Certificate of Analysis?

    The lot specific COA document can be found by entering the lot number above under the "Documents" section.

  3. How do I find price and availability?

    There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote.  USA customers:  1-800-325-3010 or view local office numbers.

  4. What is the Department of Transportation shipping information for this product?

    Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product. 

  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

  6. My question is not addressed here, how can I contact Technical Service for assistance?

    Ask a Scientist here.

Arne Baunemann et al.
Dalton transactions (Cambridge, England : 2003), 28(28), 3715-3722 (2008-07-11)
Novel mixed amido/imido/guanidinato complexes of niobium are reported. The complexes were synthesized by insertion of two equivalents of di-isopropylcarbodiimide (i-Pr-cdi) or bis-cyclohexylcarbodiimide (Cy-cdi) respectively, into the niobium-amido bonds of [Nb(NR(2))(3)(N-t-Bu)] (, R = Me; , R = Et) starting out
Thiede; T.; et al
Electrochemical Society Transactions, 16, 229-229 (2008)
Thiede; T.B.; et al
Chem. Vap. Deposition, 15, 334-334 (2009)
Chiu; J.-T.; et al
J. Chin. Chem. Soc., 45, 355-355 (1998)

商品

Nanocomposite Coatings with Tunable Properties Prepared by Atomic Layer Deposition

The properties of many devices are limited by the intrinsic properties of the materials that compose them.

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