所有图片(4)
About This Item
线性分子式:
((CH3)3CO)3SiOH
CAS号:
分子量:
264.43
MDL编号:
UNSPSC代码:
12352103
PubChem化学物质编号:
NACRES:
NA.23
质量水平
检测方案
99.999%
形式
solid
bp
205-210 °C (lit.)
mp
63-65 °C (lit.)
SMILES字符串
CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C
InChI
1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3
InChI key
HLDBBQREZCVBMA-UHFFFAOYSA-N
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一般描述
三(叔丁氧基)硅烷醇可以与各种金属烷基酰胺反应，作为气相沉积金属硅酸盐的前体。它也是二氧化硅沉积的理想前体。
应用
三(叔丁氧基)硅烷醇与四(二甲基氨基)-铪蒸气（Hf(N(CH3)2)4）反应，用于硅酸铪玻璃膜的气相沉积。三(叔丁氧基)硅烷醇被用于无定形二氧化硅和氧化铝纳米层的高度共形层的原子层沉积（ALD）。
WGK
WGK 3
闪点(°F)
Not applicable
闪点(°C)
Not applicable
个人防护装备
Eyeshields, Gloves, type N95 (US)
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