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Merck
CN

463043

乙硅烷

electronic grade

别名:

Disilicane, Disilicoethane, Disilicon hexahydride, Silicoethane, Silicon hydride (Si2 H6 )

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关于此项目

线性分子式:
Si2H6
化学文摘社编号:
1590-87-0
分子量:
62.22
NACRES:
NA.23
PubChem Substance ID:
24869889
UNSPSC Code:
12352103
EC Number:
216-466-5
MDL number:
MFCD00054678

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InChI key

PZPGRFITIJYNEJ-UHFFFAOYSA-N

InChI

1S/H6Si2/c1-2/h1-2H3

SMILES string

[SiH3][SiH3]

grade

electronic grade

assay

≥99.998% chemical purity basis

form

gas

impurities

≤50 ppm Higher silanes, <0.2 ppm Chlorosilanes, <1 ppm Argon (Ar) + Oxygen (O2), <1 ppm Carbon dioxide (CO2), <1 ppm Nitrogen (N2), <1 ppm THC, <1 ppm Water, <5 ppm Siloxanes

bp

−14.5 °C (lit.)

mp

−132.6 °C (lit.)

transition temp

critical temperature 150.9 °C

Quality Level

100

相关类别

General description

Atomic number of base material: 14 Silicon

Application

外延硅和硅基电介质快速低温沉积的前体。

Features and Benefits

通过快速低温化学气相沉积 (LTCVD)，本品可用于无定形硅、外延硅和硅基电介质的沉积。通过分子束外延 (MBE)，与锗的固体原料相结合，还可用于硅锗薄膜的外延生长。外延硅和硅基电介质快速低温沉积的前体。

signalword

Danger

Hazard Classifications

Acute Tox. 4 Dermal - Eye Irrit. 2 - Flam. Gas 1B - Press. Gas Liquefied gas - Resp. Sens. 1 - Skin Irrit. 2 - STOT SE 3

target_organs

Respiratory system

存储类别

2A - Gases

wgk

WGK 3

flash_point_f

<50.0 °F - closed cup

flash_point_c

< 10 °C - closed cup

ppe

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

法规信息

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历史批次信息供参考:

分析证书(COA)

Lot/Batch Number
MKCR8214
MKCR8213
MKCR8211
MKCR8215
MKCR8212

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