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Merck
CN

205389

Sigma-Aldrich

六甲基二硅氧烷

≥98%

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别名:
HMDSO
线性分子式:
(CH3)3SiOSi(CH3)3
CAS号:
分子量:
162.38
Beilstein:
1736258
EC 号:
MDL编号:
UNSPSC代码:
12352103
PubChem化学物质编号:
NACRES:
NA.22

蒸汽密度

>1 (vs air)

质量水平

检测方案

≥98%

形式

liquid

折射率

n20/D 1.377 (lit.)

bp

101 °C (lit.)
101 °C

mp

−59 °C (lit.)

密度

0.764 g/mL at 20 °C (lit.)

SMILES字符串

C[Si](C)(C)O[Si](C)(C)C

InChI

1S/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3

InChI key

UQEAIHBTYFGYIE-UHFFFAOYSA-N

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一般描述

六甲基二硅氧烷(HMDSO)是一种线性聚二硅氧烷 ,这种有机硅试剂通常被用作通过等离子体增强化学气相沉积(PE-CVD)技术制备硅化合物薄膜的源气体。在硅集成电路技术中,它还用作硅烷的替代品。已采用傅里叶变换质谱对其通过电子轰击产生的离解电离进行了研究。通过大气压辉光(APG)放电合成等离子体聚合的HMDSO薄膜已被报道。在148K的HMDSO晶体是单斜晶体。在P4S10中添加HMDSO可提高其作为硫化剂的效率。

应用

六甲基二硅氧烷可用于:
  • 通过干法沉积工艺来制造具有受控疏水性有机硅纳米层的气体扩散层(GDL)。
  • 分别使用精氨酸和葡萄糖作为催化剂和还原剂制备涂有二氧化硅的银纳米颗粒。

象形图

FlameEnvironment

警示用语:

Danger

危险声明

预防措施声明

危险分类

Aquatic Acute 1 - Aquatic Chronic 1 - Flam. Liq. 2

WGK

WGK 2

闪点(°F)

closed cup

闪点(°C)

closed cup

个人防护装备

Eyeshields, Faceshields, Gloves, type ABEK (EN14387) respirator filter

法规信息

危险化学品

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