高分辨率X射线衍射用校准标准品

This Standard Reference Material (SRM) provides the high-resolution X-ray diffraction (HRXRD) community with International System of Units (SI) [1] traceable Si (220) d-spacing in transmission, surface-to-crystal-plane wafer miscut, and surface-to-Si (004) Bragg angle in reflection for our reference wavelength. A unit of SRM 2000 consists of25 mm × 25 mm × 0.725 mm double-polished (100)-oriented, single-crystal Si specimens with a nominal 50 nm Si0.85Ge0.15 epitaxial layer and 25 nm Si cap. These certified values can be used to calibrate HRXRD instrumentation. For more information, please refer to the SDS and COA.

SRM 2000_cert

SRM 2000_SDS

NIST is a registered trademark of National Institute of Standards and Technology

SRM is a registered trademark of National Institute of Standards and Technology