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Merck
CN

760404

乙醇钽(V)

packaged for use in deposition systems

别名:

PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide

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About This Item

线性分子式:
Ta(OC2H5)5
CAS号:
分子量:
406.25
Beilstein:
3678999
EC 号:
MDL编号:
UNSPSC代码:
12352103
PubChem化学物质编号:
NACRES:
NA.23

形式

liquid

折射率

n20/D 1.487 (lit.)

bp

155 °C/0.01 mmHg (lit.)

mp

21 °C (lit.)

密度

1.566 g/mL at 25 °C (lit.)

SMILES字符串

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

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应用

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

象形图

Flame

警示用语:

Warning

危险声明

危险分类

Flam. Liq. 3

WGK

WGK 1

闪点(°F)

84.2 °F

闪点(°C)

29 °C

法规信息

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