蒸汽密度
9 (vs air)
质量水平
蒸汽压
0.3 mmHg ( 15 °C)
组成
volatiles, 50-80%
bp
100 °C/1 atm
溶解性
H2O: miscible at 20 °C
一般描述
Nickel compatible gold etchant is an etching solution that can be used in the removal of the gold layer from the surface. Compatibility of gold etchants with nickel allows it to be utilized in applications where nickel is used as a dominant material in the fabrication of micro-electro-mechanical systems (MEMS).
应用
用于金的可选通用蚀刻剂。可与负性和正性光致抗蚀剂相容。
特点和优势
易于以最少的底切控制蚀刻。室温下操作。无氰化物，不侵蚀镍膜。
警示用语：
Danger
危险声明
危险分类
STOT RE 1 Oral
靶器官
Thyroid
WGK
WGK 3
闪点(°F)
Not applicable
闪点(°C)
Not applicable
个人防护装备
Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
Micro-elastometry on whole blood clots using actuated surface-attached posts (ASAPs)
Judith RM, et al.
Lab on a chip, 15(5), 1385-1393 (2015)
Determination of young's modulus of electrochemically co-deposited Ni-Al2O3 nanocomposite
Wei X, et al.
Materials Letters, 62(12-13), 1916-1918 (2008)
A monolithic micro-optical interferometer deep etched into fused silica
Weigel C, et al.
Microelectronic Engineering, 174(5), 40-45 (2017)
实验方案
Photoresist kit offers pre-weighed chemical components for lithographic processes, with separate etchants for various substrate choices.
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