463094
三甲基硼
electronic grade, ≥98.35%
别名:
Trimethylborane
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关于此项目
线性分子式:
B(CH3)3
化学文摘社编号:
分子量:
55.91
UNSPSC Code:
12352300
PubChem Substance ID:
EC Number:
209-816-3
MDL number:
InChI key
WXRGABKACDFXMG-UHFFFAOYSA-N
InChI
1S/C3H9B/c1-4(2)3/h1-3H3
SMILES string
CB(C)C
grade
electronic grade
assay
≥98.35%
form
gas
reaction suitability
core: boron
impurities
<1 ppm Oxygen (O2), <1.5% Dimethylethylborane [B(CH3)2C2H5], <10 ppm Carbon dioxide (CO2), <10 ppm Nitrogen (N2), <100 ppm Methane (CH4), <1000 ppm Trimethylamine (TMA), <50 ppm Hydrogen (H2)
bp
−20.2 °C (lit.)
mp
−161.5 °C (lit.)
Application
三甲基硼可作为硼-碳膜化学气相沉积的有机金属前体，以及硼磷硅玻璃 (BPSG) 沉积的硼源。
化学气相沉积 (CVD) 所形成碳化硼薄膜的前体。
Other Notes
建议使用不锈钢调节器 Z527416 或 Z527424。
signalword
Danger
hcodes
Hazard Classifications
Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B
存储类别
2A - Gases
wgk
WGK 1
flash_point_f
Not applicable
flash_point_c
Not applicable
ppe
Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)
法规信息
新产品
此项目有
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