推荐产品
等级
electronic grade
质量水平
方案
≥99.99%
表单
liquid
反应适用性
core: silicon
杂质
<0.5 ppm Carbon monoxide (CO)
<1 ppm Argon + oxygen (Ar + O2)
<1 ppm Carbon dioxide (CO2)
<10 ppm Methane (CH4)
<3 ppm Nitrogen (N2)
<50 ppm Hydrogen fluoride (HF)
沸点
−86 °C (lit.)
mp
−90 °C (lit.)
转变温度
critical temperature −14.2 °C
密度
3.57 g/mL at 25 °C (lit.)
SMILES字符串
F[Si](F)(F)F
InChI
1S/F4Si/c1-5(2,3)4
InChI key
ABTOQLMXBSRXSM-UHFFFAOYSA-N
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应用
四氟化硅被用于离子注入工艺，并通过等离子体辅助CVD作为氟化二氧化硅的前体。SiF4-SiH4-H2的混合物最近已被用于通过远程等离子体化学气相沉积（RPCVD）沉积多晶硅薄膜。这种氟化薄膜在室温下表现出可见光致发光（PL）。
包装
储存于碳钢气阀瓶中，带CGA180M/CGA110F针阀。
适用：
适用：
- Aldrich®气阀瓶站系统
- Aldrich®气阀瓶气体调节器
其他说明
参见技术信息手册AL-151 气体调节器：选型、安装和操作
法律信息
Aldrich is a registered trademark of Sigma-Aldrich Co. LLC
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调节阀
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说明
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警示用语：
Danger
危险声明
危险分类
Acute Tox. 2 Inhalation - Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1A
补充剂危害
储存分类代码
2A - Gases
WGK
WGK 3
闪点(°F)
Not applicable
闪点(°C)
Not applicable
个人防护装备
Faceshields, Gloves, Goggles
法规信息
新产品
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