推荐产品
等级
electronic grade
蒸汽密度
0.628 (−58 °C, vs air)
方案
≥99.9%
表单
liquid
杂质
<10 ppm Carbon dioxide (CO2)
<10 ppm Nitrogen (N2)
<100 ppm Dimethylsilane (CH3)2SiH2
<100 ppm Methylchlorosilane CH3SiH2Cl
<2 ppm Argon + Oxygen (Ar + O2)
<50 ppm Methane (CH4)
<50 ppm Silane (SiH4)
沸点
−57 °C (lit.)
mp
−157 °C (lit.)
SMILES字符串
C[SiH3]
InChI
1S/CH6Si/c1-2/h1-2H3
InChI key
UIUXUFNYAYAMOE-UHFFFAOYSA-N
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特点和优势
甲基硅烷用于碳化硅 (SiC) 的等离子体辅助 CVD，以及作为 SiGeC 合金层通过快速热 CVD 法外延生长的前体。最新的进展包括使用甲基硅烷作为硅-碳-氢聚合物（用作光致抗蚀剂）的前体。
通过化学气相沉积 (CVD) 和分子束外延 (MBE) 形成碳化硅或合金薄膜时的前体。
推荐产品
推荐使用不锈钢调节器 Z527416 或 Z527424。
警示用语：
Danger
危险分类
Acute Tox. 4 Dermal - Flam. Gas 1 - Press. Gas Liquefied gas
补充剂危害
储存分类代码
2A - Gases
WGK
WGK 1
闪点(°F)
Not applicable
闪点(°C)
Not applicable
个人防护装备
Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)
法规信息
新产品
Yifan Li et al.
Beilstein journal of nanotechnology, 8, 2504-2514 (2017-12-21)
Interface conditions are an important property that can affect the drag of fluid flow. For surfaces with different oleophobicity, the boundary slip at the solid-oil interface is mostly larger than that at the solid-water interface. Roughness is a key factor
Mi, J.
J. Vac. Sci. Technol. B, 14, 1660-1660 (1996)
C A Diaz-Botia et al.
Journal of neural engineering, 14(5), 056006-056006 (2017-06-03)
Current neural probes have a limited device lifetime of a few years. Their common failure mode is the degradation of insulating films and/or the delamination of the conductor-insulator interfaces. We sought to develop a technology that does not suffer from
Hai-Feng Wu et al.
Natural product research, 31(21), 2484-2490 (2017-04-14)
One new cycloartane triterpenoid glycoside, soulieoside Q (1), together with four known compounds (2-5) were isolated from the ethanolic extract of the rhizomes of Souliea vaginata Maxim. The structure of the new compound was determined by extensive spectroscopic analysis including
Zulan Li et al.
Biosensors & bioelectronics, 166, 112444-112444 (2020-08-08)
How to balance the sensitivity and signal-to-noise ratio of immunosensor remains many challenges during various diseases diagnosis. Here we develop a new microfluidic immunosensor based on surface-modified mesoporous nanofibers, and simultaneously realize an ultra-sensitivity and high signal-to-noise ratio for the
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