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Merck
CN

463043

Disilane

electronic grade

Synonym(s):

Disilicane, Disilicoethane, Disilicon hexahydride, Silicoethane, Silicon hydride (Si2 H6 )

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About This Item

Linear Formula:
Si2H6
CAS Number:
1590-87-0
Molecular Weight:
62.22
NACRES:
NA.23
PubChem Substance ID:
24869889
UNSPSC Code:
12352103
EC Number:
216-466-5
MDL number:
MFCD00054678

Key Documents

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Product Name

Disilane, electronic grade

InChI key

PZPGRFITIJYNEJ-UHFFFAOYSA-N

InChI

1S/H6Si2/c1-2/h1-2H3

SMILES string

[SiH3][SiH3]

grade

electronic grade

assay

≥99.998% chemical purity basis

form

gas

impurities

≤50 ppm Higher silanes
<0.2 ppm Chlorosilanes
<1 ppm Argon (Ar) + Oxygen (O2)
<1 ppm Carbon dioxide (CO2)
<1 ppm Nitrogen (N2)
<1 ppm THC
<1 ppm Water
<5 ppm Siloxanes

bp

−14.5 °C (lit.)

mp

−132.6 °C (lit.)

transition temp

critical temperature 150.9 °C

Quality Level

100

Related Categories

Application

Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Features and Benefits

Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD). Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium. Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

General description

Atomic number of base material: 14 Silicon

signalword

Danger

Hazard Classifications

Acute Tox. 4 Dermal - Eye Irrit. 2 - Flam. Gas 1B - Press. Gas Liquefied gas - Resp. Sens. 1 - Skin Irrit. 2 - STOT SE 3

target_organs

Respiratory system

Storage Class

2A - Gases

wgk

WGK 3

flash_point_f

<50.0 °F - closed cup

flash_point_c

< 10 °C - closed cup

ppe

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

Regulatory Information

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Certificates of Analysis (COA)

Lot/Batch Number
MKCR8214
MKCR8213
MKCR8211
MKCR8215
MKCR8212

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