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463043

Sigma-Aldrich

Disilane

electronic grade

Synonym(s):

Disilicane, Disilicoethane, Disilicon hexahydride, Silicoethane, Silicon hydride (Si2 H6 )

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About This Item

Linear Formula:
Si2H6
CAS Number:
1590-87-0
Molecular Weight:
62.22
EC Number:
216-466-5
MDL number:
MFCD00054678
UNSPSC Code:
12352103
PubChem Substance ID:
24869889
NACRES:
NA.23

grade

electronic grade

Quality Level

100

Assay

≥99.998% chemical purity basis

form

gas

impurities

≤50 ppm Higher silanes
<0.2 ppm Chlorosilanes
<1 ppm Argon (Ar) + Oxygen (O2)
<1 ppm Carbon dioxide (CO2)
<1 ppm Nitrogen (N2)
<1 ppm THC
<1 ppm Water
<5 ppm Siloxanes

bp

−14.5 °C (lit.)

mp

−132.6 °C (lit.)

transition temp

critical temperature 150.9 °C

SMILES string

[SiH3][SiH3]

InChI

1S/H6Si2/c1-2/h1-2H3

InChI key

PZPGRFITIJYNEJ-UHFFFAOYSA-N

Related Categories

General description

Atomic number of base material: 14 Silicon

Application

Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Features and Benefits

Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD). Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium. Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Signal Word

Danger

Hazard Classifications

Acute Tox. 4 Dermal - Eye Irrit. 2 - Flam. Gas 1B - Press. Gas Liquefied gas - Resp. Sens. 1 - Skin Irrit. 2 - STOT SE 3

Target Organs

Respiratory system

WGK

WGK 3

Flash Point(F)

<50.0 °F

Flash Point(C)

< 10 °C

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Regulatory Information

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