NIST8820
Scanning Electron Microscope Scale Calibration Artifact
NIST®SRM®
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Empirical Formula (Hill Notation):
Si
Recommended Products
form
chips
packaging
pkg of 1 g (20mm x 20mm chip)
manufacturer/tradename
NIST®
technique(s)
electron microscopy: suitable
application(s)
semiconductor
storage temp.
15-25°C
InChI
1S/Si
InChI key
XUIMIQQOPSSXEZ-UHFFFAOYSA-N
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General description
Reference Material (RM) 8820 is primarily intended to be used for X and Y scale (or magnification) calibrations from less than 10 times magnifications to more than 100 000 times magnifications in scanning electron microscopes (SEMs). It was designed to provide good contrast at low and high electron landing energies (accelerating voltages). Beyond testing scale calibration, it can be used for non-linearity measurements, especially at lower than 10,000 times magnifications. It can also be used for optical and scanning probe and other types of microscopes. Most SEMs require a set of calibration structures of different sizes to cover the full range of possible magnifications. This Reference Material (in part using the ideas implemented in earlier NIST scale calibration artifacts) is designed to meet that need. A unit of RM 8820 consists of a 20 mm × 20 mm lithographically patterned silicon chip.
SRM 8820_cert
SRM 8820 _SDS
SRM 8820_cert
SRM 8820 _SDS
Other Notes
Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Legal Information
NIST is a registered trademark of National Institute of Standards and Technology
SRM is a registered trademark of National Institute of Standards and Technology
Regulatory Information
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Certificates of Analysis (COA)
Search for Certificates of Analysis (COA) by entering the products Lot/Batch Number. Lot and Batch Numbers can be found on a product’s label following the words ‘Lot’ or ‘Batch’.
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