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About This Item
Product Name
Tetramethylammonium hydroxide solution, 25 wt. % in methanol
InChI
1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1
SMILES string
[OH-].C[N+](C)(C)C
InChI key
WGTYBPLFGIVFAS-UHFFFAOYSA-M
vapor pressure
17.5 mmHg ( 20 °C)
form
liquid
concentration
25 wt. % in methanol
impurities
≤10% water
≤2% chloride
density
0.866 g/mL at 25 °C
functional group
amine
Quality Level
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Application
General description
Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate.
signalword
Danger
Hazard Classifications
Acute Tox. 2 Dermal - Acute Tox. 2 Oral - Acute Tox. 3 Inhalation - Aquatic Chronic 3 - Eye Dam. 1 - Flam. Liq. 3 - Skin Corr. 1B - STOT RE 1 Dermal - STOT SE 1
target_organs
Eyes,Central nervous system, Liver,thymus
Storage Class
3 - Flammable liquids
wgk
WGK 3
flash_point_f
80.6 °F - closed cup
flash_point_c
27 °C - closed cup
ppe
Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
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