334901
Tetramethylammonium hydroxide solution
25 wt. % in methanol
Synonym(s):
N,N,N-trimethyl-methanaminium hydroxide, TMAH, TMAOH
About This Item
vapor pressure
17.5 mmHg ( 20 °C)
Quality Level
form
liquid
concentration
25 wt. % in methanol
impurities
≤10% water
≤2% chloride
density
0.866 g/mL at 25 °C
SMILES string
[OH-].C[N+](C)(C)C
InChI
1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1
InChI key
WGTYBPLFGIVFAS-UHFFFAOYSA-M
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General description
Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate.
Application
Signal Word
Danger
Hazard Statements
Precautionary Statements
Hazard Classifications
Acute Tox. 2 Dermal - Acute Tox. 2 Oral - Acute Tox. 3 Inhalation - Aquatic Chronic 3 - Eye Dam. 1 - Flam. Liq. 3 - Skin Corr. 1B - STOT RE 1 Dermal - STOT SE 1
Target Organs
Eyes,Central nervous system, Liver,thymus
WGK
WGK 3
Flash Point(F)
80.6 °F
Flash Point(C)
27 °C
Personal Protective Equipment
Regulatory Information
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