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Merck
CN

331635

Tetramethylammonium hydroxide solution

25 wt. % in H₂O, solution

Synonym(s):

TMAH solution

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About This Item

Linear Formula:
(CH3)4N(OH)
CAS Number:
75-59-2
Molecular Weight:
91.15
NACRES:
NA.21
PubChem Substance ID:
24859984
UNSPSC Code:
12352100
MDL number:
MFCD00008280
Beilstein/REAXYS Number:
3558708

Key Documents

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Product Name

Tetramethylammonium hydroxide solution, 25 wt. % in H2O

InChI

1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1

SMILES string

[OH-].C[N+](C)(C)C

InChI key

WGTYBPLFGIVFAS-UHFFFAOYSA-M

vapor pressure

17.5 mmHg ( 20 °C)

form

liquid

concentration

25 wt. % in H2O

refractive index

n20/D 1.3806

Quality Level

200

pH

>13 (20 °C)

solubility

water: soluble

density

1.016 g/mL at 25 °C

functional group

amine

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Application

Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate.
Tetramethylammonium hydroxide solution (25 wt.% solution in water) may be used as a base for pH adjustment to obtain hexagonal mesoporous aluminophosphate (TAP).

General description

Tetramethylammonium hydroxide solution is commonly used as a strong base and nucleophilic source in organic synthesis reactions.

signalword

Danger

Hazard Classifications

Acute Tox. 1 Dermal - Acute Tox. 2 Oral - Aquatic Chronic 2 - Eye Dam. 1 - Skin Corr. 1B - STOT RE 1 Dermal - STOT SE 1

target_organs

Central nervous system, Liver,thymus

Storage Class

6.1B - Non-combustible acute toxic Cat. 1 and 2 / very toxic hazardous materials

wgk

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter

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Certificates of Analysis (COA)

Lot/Batch Number
MKCZ5560
MKCZ4677
MKCX6333
MKCW3535
MKCT0106

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Synthesis of mesoporous hexagonal titanium aluminophosphate molecular sieves and their catalytic applications
Kapoor MP & Raj A.
Applied Catalysis A: General, 203(2), 311-319 (2000)
Tetramethylammonium Hydroxide
Knight J
eEROS (Encyclopedia of Reagents for Organic Synthesis) (2001)
Palladium-mediated carboxylation of aryl halides (triflates) or benzyl halides using [13 C]/[11 C] carbon monoxide with tetrabutylammonium hydroxide or trimethylphenylammonium hydroxide
Karimi F, et al.
Journal of the Chemical Society. Perkin Transactions 1, 20, 2256-2259 (2002)
The characteristic behavior of TMAH water solution for anisotropic etching on both silicon substrate and SiO 2 layer.
Chen PH, et al.
Sensors and actuators A, Physical, 93(2), 132-137 (2001)
Study on anisotropic silicon etching characteristics in various surfactant-added tetramethyl ammonium hydroxide water solutions.
Yang CR, et al.
Journal of Micromechanics and Microengineering, 15(11), 2028-2028 (2005)
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