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About This Item
Linear Formula:
Ta(OC2H5)5
CAS Number:
Molecular Weight:
406.25
Beilstein:
3678999
EC Number:
MDL number:
UNSPSC Code:
12352103
PubChem Substance ID:
NACRES:
NA.23
form
liquid
refractive index
n20/D 1.487 (lit.)
bp
155 °C/0.01 mmHg (lit.)
mp
21 °C (lit.)
density
1.566 g/mL at 25 °C (lit.)
SMILES string
CCO[Ta](OCC)(OCC)(OCC)OCC
InChI
1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
InChI key
HSXKFDGTKKAEHL-UHFFFAOYSA-N
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Application
Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
Signal Word
Warning
Hazard Statements
Precautionary Statements
Hazard Classifications
Flam. Liq. 3
Storage Class Code
3 - Flammable liquids
WGK
WGK 1
Flash Point(F)
84.2 °F - closed cup
Flash Point(C)
29 °C - closed cup
Regulatory Information
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