760404
Tantalum(V) ethoxide
packaged for use in deposition systems
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Synonym(s):
PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide
Linear Formula:
Ta(OC2H5)5
CAS Number:
Molecular Weight:
406.25
Beilstein:
3678999
EC Number:
MDL number:
UNSPSC Code:
12352300
PubChem Substance ID:
NACRES:
NA.23
Recommended Products
form
liquid
refractive index
n20/D 1.487 (lit.)
bp
155 °C/0.01 mmHg (lit.)
mp
21 °C (lit.)
density
1.566 g/mL at 25 °C (lit.)
SMILES string
CCO[Ta](OCC)(OCC)(OCC)OCC
InChI
1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
InChI key
HSXKFDGTKKAEHL-UHFFFAOYSA-N
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Application
Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
Signal Word
Warning
Hazard Statements
Precautionary Statements
Hazard Classifications
Flam. Liq. 3
WGK
WGK 1
Flash Point(F)
84.2 °F
Flash Point(C)
29 °C
Regulatory Information
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