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About This Item
Linear Formula:
Ta(OC2H5)5
CAS Number:
Molecular Weight:
406.25
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
EC Number:
228-010-2
Beilstein/REAXYS Number:
3678999
MDL number:
form
liquid
refractive index
n20/D 1.487 (lit.)
bp
155 °C/0.01 mmHg (lit.)
mp
21 °C (lit.)
density
1.566 g/mL at 25 °C (lit.)
SMILES string
CCO[Ta](OCC)(OCC)(OCC)OCC
InChI
1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
InChI key
HSXKFDGTKKAEHL-UHFFFAOYSA-N
Application
Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
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signalword
Warning
hcodes
Hazard Classifications
Flam. Liq. 3
Storage Class
3 - Flammable liquids
wgk
WGK 1
flash_point_f
84.2 °F - closed cup
flash_point_c
29 °C - closed cup
Regulatory Information
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Global Trade Item Number
| SKU | GTIN |
|---|---|
| CDS020603-5MG | 04061828993871 |
| 760404-25G | 04061838478597 |