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About This Item
Linear Formula:
Ta(OC2H5)5
CAS Number:
Molecular Weight:
406.25
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
EC Number:
228-010-2
Beilstein/REAXYS Number:
3678999
MDL number:
Product Name
Tantalum(V) ethoxide, packaged for use in deposition systems
InChI
1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
InChI key
HSXKFDGTKKAEHL-UHFFFAOYSA-N
SMILES string
CCO[Ta](OCC)(OCC)(OCC)OCC
form
liquid
refractive index
n20/D 1.487 (lit.)
bp
155 °C/0.01 mmHg (lit.)
mp
21 °C (lit.)
density
1.566 g/mL at 25 °C (lit.)
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Application
Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
signalword
Warning
hcodes
Hazard Classifications
Flam. Liq. 3
Storage Class
3 - Flammable liquids
wgk
WGK 1
flash_point_f
84.2 °F - closed cup
flash_point_c
29 °C - closed cup
Regulatory Information
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