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Safety Information

667471

Sigma-Aldrich

Anisotropic Silicon <100> Etchant

Synonym(s):

Preferential Silicon Etchant, Silicon 100 Etch, Silicon Preferential Etch

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About This Item

MDL number:
MFCD08705341
UNSPSC Code:
12161700
NACRES:
NA.23

refractive index

n20/D 1.484

bp

>240 °C

density

1.001 g/mL at 25 °C

General description

Ethylenediamine based - for < 100 > crystal orientation

Application

Etch rate ~80microns/hour at @ 100 °C. Etches cleanly with only a deionized water rinse needed. Will not etch Au or Ta.

Signal Word

Danger

Hazard Classifications

Acute Tox. 3 Dermal - Acute Tox. 4 Oral - Aquatic Chronic 3 - Carc. 1B - Eye Dam. 1 - Flam. Liq. 3 - Muta. 2 - Resp. Sens. 1 - Skin Corr. 1B - Skin Sens. 1

Storage Class Code

3 - Flammable liquids

WGK

WGK 3

Flash Point(F)

109.9 °F

Flash Point(C)

43.3 °C

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Regulatory Information

危险化学品

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Certificates of Analysis (COA)

Lot/Batch Number
MKBW4691V
MKBV1240V
MKBK0278V
MKBD2628
11603BE

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