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473537

Sigma-Aldrich

Tetrakis(ethylmethylamido)titanium(IV)

electronic grade, ≥99.99%

Synonym(s):

Tetrakis(ethylmethylamino)titanium(IV)

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About This Item

Linear Formula:
[(CH3C2H5)N]4Ti
CAS Number:
Molecular Weight:
280.28
MDL number:
UNSPSC Code:
12352300
PubChem Substance ID:
NACRES:
NA.23

grade

electronic grade

Assay

≥99.99%

form

liquid

reaction suitability

core: titanium

bp

80 °C/0.1 mmHg (lit.)

density

0.923 g/mL at 25 °C (lit.)

storage temp.

2-8°C

SMILES string

CCN(C)[Ti](N(C)CC)(N(C)CC)N(C)CC

InChI

1S/4C3H8N.Ti/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4

InChI key

LNKYFCABELSPAN-UHFFFAOYSA-N

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General description

Atomic number of base material: 22 Titanium

Application

Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).

Other Notes

Please inquire for bulk quantity, pricing, and packaging options.

Pictograms

FlameCorrosion

Signal Word

Danger

Hazard Statements

Hazard Classifications

Flam. Liq. 2 - Skin Corr. 1B - Water-react 1

Supplementary Hazards

WGK

WGK 3

Flash Point(F)

closed cup

Flash Point(C)

closed cup

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Regulatory Information

危险化学品

Certificates of Analysis (COA)

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Chemistry of Materials, 9, 76-76 (1997)

Articles

Titanium dioxide applications: Semiconducting material characteristics and diverse functionalities.

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