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Merck
CN

463027

Germane

electronic grade, ≥99.997%

Synonym(s):

Germanium tetrahydride, Germanium(4+) hydride, Monogermane, Tetrahydrogermane

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About This Item

Linear Formula:
GeH4
CAS Number:
7782-65-2
Molecular Weight:
76.67
UNSPSC Code:
12352300
PubChem Substance ID:
24869887
EC Number:
231-961-6
MDL number:
MFCD00011028

Key Documents

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Product Name

Germane, electronic grade, ≥99.997%

InChI key

QUZPNFFHZPRKJD-UHFFFAOYSA-N

InChI

1S/GeH4/h1H4

SMILES string

[GeH4]

grade

electronic grade

vapor density

1.53 (−142 °C, vs air)

assay

≥99.997%

form

gas

impurities

<0.5 ppm Oxygen (O2)
<1 ppm Carbon monoxide + Trigermane (CO+Ge3H8)
<1 ppm THC
<1 ppm Water (H2O)
<2 ppm Carbon dioxide (CO2)
<2 ppm Nitrogen (N2)
<20 ppm Digermane (Ge2H6)
<5 ppm Chlorogermanes
<5 ppm Germoxanes
<50 ppm Hydrogen (H2)

bp

−88.4 °C (lit.)

mp

−165 °C (lit.)

transition temp

critical temperature 35 °C

Features and Benefits

Germane gas is used in the deposition of epitaxial and amorphous SiGe alloy layers used in the production of high performance devices including photovoltaic cells and integrated circuits (IC). Precursor to germanium-containing thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). A CVD precursor for germanium carbide semiconducting films.

Other Notes

Stainless steel regulators Z527416 or Z527424 are recommended.

signalword

Danger

Hazard Classifications

Acute Tox. 2 Inhalation - Acute Tox. 4 Oral - Flam. Gas 1A - Press. Gas Compr. Gas

Storage Class

2A - Gases

wgk

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

Regulatory Information

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Certificates of Analysis (COA)

Lot/Batch Number
04245HH
15013TQ
12474CC
14813TQ
07406HO

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