Skip to Content
Merck
CN
  • Electrochemical vapor deposition of semiconductors from gas phase with a solid membrane cell.

Electrochemical vapor deposition of semiconductors from gas phase with a solid membrane cell.

Journal of the American Chemical Society (2015-05-06)
Sung Ki Cho, Fu-Ren F Fan, Allen J Bard
ABSTRACT

We demonstrate the feasibility of semiconductor deposition via the electrochemical reduction of gaseous precursors by the use of an anhydrous proton-conducting membrane, the solid acid CsHSO4, at 165 °C. This membrane electrode assembly was operated within the oxidation of hydrogen on a porous Pt anode and the deposition of Si or Ge under bias at the cathode from chloride-based gaseous precursors; SiCl4 and GeCl4 in an Ar flow with a reduction potential over -1.0 V (vs RHE).

MATERIALS
Product Number
Brand
Product Description

Sigma-Aldrich
Ethanolamine, liquid, BioReagent, suitable for cell culture, ≥98%
Sigma-Aldrich
Ethanolamine, ≥99%
Sigma-Aldrich
Ethanolamine, ≥98%
Sigma-Aldrich
Rhein, technical grade
Sigma-Aldrich
Ethanolamine, ACS reagent, ≥99.0%
Sigma-Aldrich
Rhein
Sigma-Aldrich
Ethanolamine, purified by redistillation, ≥99.5%
Sigma-Aldrich
Sulfuric acid, 99.999%
Sigma-Aldrich
Benzene, anhydrous, 99.8%
Sigma-Aldrich
Toluene, anhydrous, 99.8%
Sigma-Aldrich
Toluene, JIS special grade, ≥99.5%