Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ABSTRACT

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALS

Product Number

Brand

Product Description

595063

Sigma-Aldrich

Titanium nitride, <3 μm

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Titanium, rod, 200mm, diameter 9.5mm, annealed, 99.99+%

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Titanium, rod, 500mm, diameter 6mm, annealed, 99.6+%

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Titanium, tube, 1000mm, outside diameter 9.5mm, inside diameter 8.2mm, wall thickness 0.65mm, annealed, 99.6+%

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Titanium, rod, 25mm, diameter 50mm, 99.99+%

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Titanium, tube, 1000mm, outside diameter 4.25mm, inside diameter 3.75mm, wall thickness 0.25mm, annealed, 99.6+%

GF82517722

Titanium, tube, 1000mm, outside diameter 6.35mm, inside diameter 4.57mm, wall thickness 0.89mm, annealed, 99.6+%

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Titanium, tube, 200mm, outside diameter 25.4mm, inside diameter 23.62mm, wall thickness 0.89mm, annealed, 99.6+%

GF68670366

Titanium, tube, 1220mm, outside diameter 2.03mm, inside diameter 1.55mm, wall thickness 0.24mm, annealed, 99.6+%

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Titanium, tube, 100mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

GF88742054

Titanium, tube, 200mm, outside diameter 4.25mm, inside diameter 3.75mm, wall thickness 0.25mm, annealed, 99.6+%

GF98611623

Titanium, rod, 200mm, diameter 8.0mm, as drawn, 99.99+%

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Titanium, rod, 100mm, diameter 9.5mm, annealed, 99.99+%

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Titanium, rod, 100mm, diameter 10mm, annealed, 99.6+%

GF89377701

Titanium, tube, 100mm, outside diameter 25.4mm, inside diameter 23.62mm, wall thickness 0.89mm, annealed, 99.6+%

GF66991179

Titanium, rod, 100mm, diameter 2mm, as drawn, 99.99+%

GF87716997

Titanium, rod, 100mm, diameter 16mm, as drawn, 99.99+%

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Titanium, wire reel, 100m, diameter 0.75mm, as drawn, 99.6+%

GF91672139

Titanium, wire reel, 20m, diameter 0.05mm, hard, 99.8%

GF96391402

Titanium, wire reel, 25m, diameter 0.20mm, annealed, 99.6+%

GF97204990

Titanium, wire reel, 100m, diameter 0.25mm, annealed, 99.6+%

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Titanium, wire reel, 1m, diameter 0.25mm, as drawn, 99.99+%

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Titanium, wire reel, 0.5m, diameter 1.0mm, as drawn, 99.6+%

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Titanium, tube, 500mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

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Titanium, tube, 500mm, outside diameter 3.0mm, inside diameter 1.5mm, wall thickness 0.75mm, annealed, 99.6+%

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Titanium, wire reel, 10m, diameter 1.5mm, as drawn, 99.6+%

GF82635138

Titanium, tube, 500mm, outside diameter 6.35mm, inside diameter 5.53mm, wall thickness 0.41mm, annealed, 99.6+%

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Titanium, wire reel, 500m, diameter 0.20mm, annealed, 99.6+%